Transcription
Bosch Micromachined Sensorsystemsin Series ProductionRobert Bosch CorporationResearch and Technology Center4009 Miranda Ave, CA94304Email: mems@rtc.bosch.com
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Robert Bosch GmbH reserves all rights including industrial property rights and all rights of disposal such as copying and passing on to third parties.Silicon SensorsK8/STZ DQ 80929 e
Bosch Micromachined SensorsystemsIntegratedPressure SensorRobert Bosch CorporationResearch and Technology Center4009 Miranda Ave, CA94304Email: mems@rtc.bosch.com
Robert Bosch GmbH reserves all rights including industrial property rights and all rights of disposal such as copying and passing on to third parties.Micromechanical Pressure Sensor
Sensor chip MembraneWire bondsReferencevacuumMetalhousingGlass socketIntakemanifold pressure Robert Bosch GmbH reserves all rights including industrial property rights and all rights of disposal such as copying and passing on to third parties.Pressure Sensor in Bulk MicromachiningK8 / L MPK60913 e
Wet chemical etching "Anodic wafer bondingIsotropic etching in an acid etching bath(imprecise shapes)EtchingmaskSiliconAnisotropic etching in an alkaline etching bath(precise shapes)Pyrex glassSiliconHot platePyrex glass waferSilicon waferK8/L MPK60914 e Robert Bosch GmbH reserves all rights including industrial property rights and all rights of disposal such as copying and passing on to third parties.Bulk Micromachining
Robert Bosch GmbH reserves all rights including industrial property rights and all rights of disposal such as copying and passing on to third parties.Atmospheric Pressure Sensor SMD082K8/L SE 81101 e
Sensor cell Robert Bosch GmbH reserves all rights including industrial property rights and all rights of disposal such as copying and passing on to third parties.Micromechanical Intake Manifold Pressure SensorK3 / L 826 e
Bosch Micromachined SensorsystemsMass Air Flow SensorRobert Bosch CorporationResearch and Technology Center4009 Miranda Ave, CA94304Email: mems@rtc.bosch.com
5mmm icslifck eramihT nco1lm onifnThi n silico5199199irewtHo0198K8/STZ DQ 80920 e Robert Bosch GmbH reserves all rights including industrial property rights and all rights of disposal such as copying and passing on to third parties.Mass Air Flow Sensors – Generations
Measuring principleDirection ofair flowT Robert Bosch GmbH reserves all rights including industrial property rights and all rights of disposal such as copying and passing on to third parties.HFM5 Micromechanical Mass Air Sensorwith air flowwithout air flow T0T1T2Sensor elementHeater bandMembraneK3 / L 825 e
Sensor element Robert Bosch GmbH reserves all rights including industrial property rights and all rights of disposal such as copying and passing on to third parties.3 mmHFM5 Micromechanical Mass Air Flow MeterK3 / L 824 e
Bosch Micromachined SensorsystemsSurface MicromachinedAcceleration SensorsRobert Bosch CorporationResearch and Technology Center4009 Miranda Ave, CA94304Email: mems@rtc.bosch.com
Si Micromachined Yaw Rate SensorDesignLinear Accelerometer: Surface micromachining 2µm gaps 12 µm thick Poly-Silicon 1pF working capacitance folded springs high sensitivity internal stresscompensationfolienSAE 980219K8/STZ 01.98
Scanning electron microscope imageof the comb structureWire bondsSensor chipSeismic mass with movable electrodesEvaluationcircuit200 µmSuspension springFixed electrodesK8 / L MPK60915 e Robert Bosch GmbH reserves all rights including industrial property rights and all rights of disposal such as copying and passing on to third parties.Acceleration Sensor in Surface Micromachining
Robert Bosch GmbH reserves all rights including industrial property rights and all rights of disposal such as copying and passing on to third parties.Acceleration SensorsK8 / L SE 70901e
Bosch Micromachined SensorsystemsSi-MicromachinedYaw Rate SensorRobert Bosch CorporationResearch and Technology Center4009 Miranda Ave, CA94304Email: mems@rtc.bosch.com
Robert Bosch GmbH reserves all rights including industrial property rights and all rights of disposal such as copying and passing on to third parties.Automotive Electronics – Electronic Stability Program (ESP)K8/STZ DQ 80924 e
Yaw rateΩAcceleration sensorDirection of oscillationvDirection of sensitivitySpringOscillating massK1/ LE61120 Robert Bosch GmbH reserves all rights including industrial property rights and all rights of disposal such as copying and passing on to third parties.Micromachined Yaw Rate Sensor6534 e
Si Micromachined Yaw Rate SensorDesignFolded BeamCoriolis AccelerometerCoupling SpringfolienSAE 980219K8/STZ 01.98
Si Micromachined Yaw Rate SensorPackagingCross-section of the sensing elementSilicon Cap WaferBond PadAccelerometerOscillatorSensor WaferSilicon Base WaferfolienSAE 980219K8/STZ 01.98
Si Micromachined Yaw Rate SensorPackagingCross section of the module:MagnetMetal CoverMetal BaseSensing ElementHybridfolienSAE 980219K8/STZ 01.98
100 m50 m500 m Robert Bosch GmbH reserves all rights including industrial property rights and all rights of disposal such as copying and passing on to third parties.Micromachined Angular Rate SensorK8/STZ DQ 80927 e
Robert Bosch GmbH reserves all rights including industrial property rights and all rights of disposal such as copying and passing on to third parties.Silicon SensorsK8/STZ DQ 80929 e
(Headlamp aiming system) ehicle dynamics control) (ACC, precrash) Tilt sensor Acceleration sensor ) Tilt sensor ehicle security sensor) orque sensor (Power steering) (Roll over sensing) Angular rate sensor Rotional speed sensor Yaw rate sensor Seat occupancy sensor ) Manifold absolute pressure sensor (Electronic diesel control, motronic) Angular rate sensor (Navigation) Air quality sensor (Air .
