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Operating Manual andProgramming ReferenceModels RGA100,RGA200, and RGA300Residual Gas Analyzer1290-D Reamwood Ave.Sunnyvale, CA 94089408-744-9040 · 408-744-9049 faxinfo@thinkSRS.com · www.thinkSRS.comRevision 1.8 (May, 2009)
iiCertificationStanford Research Systems certifies that this product met its published specifications at the timeof shipment.WarrantyThis Stanford Research Systems product is warranted against defects in materials andworkmanship for a period of one (1) year from the date of shipment.ServiceFor warranty service or repair, this product must be returned to a Stanford Research Systemsauthorized service facility. Contact Stanford Research Systems or an authorized representativebefore returning this product for repair. All users returning an RGA Probe back to the factory forrepair and/or service must submit a correctly completed “Declaration of Contamination ofVacuum Equipment” form along with the instrument. The SRS personnel carrying out the repairand service of vacuum equipment must be informed of the condition of the components beforeany work is done on the parts. A copy of the form is attached to the end of this manual.Information in this document is subject to change without notice.Copyright Stanford Research Systems, Inc., 1996. All rights reserved.Stanford Research Systems, Inc.1290-D Reamwood AvenueSunnyvale, California 94089SRS Residual Gas Analyzer
Safety and Preparation For UseiiiPrinted in U.S.A.Safety and Preparation for UseWARNING!Dangerous voltages, capable of causing injury or death, are present in this instrument.Use extreme caution whenever the instrument cover is removed. Do not remove thecover while the unit is plugged into a live outlet.Line CordThe RGA built-in power module option (Opt02) has a detachable, three-wire power cordfor connection to the power source and to a protective ground. The exposed metal partsof the instrument are connected to the outlet ground to protect against electrical shock.Always use an outlet which has a properly connected protective ground.ServiceDo not attempt to service or adjust this instrument unless another person, capable ofproviding first aid or resuscitation, is present.Do not install substitute parts or perform any unauthorized modifications to thisinstrument. Contact the factory for instructions on how to return the instrument forauthorized service and adjustment.FanThe fans in the RGA are required to maintain proper operation. Do not block the vents inthe chassis or the unit may not operate properly.SRS Residual Gas Analyzer
ivSRS Residual Gas Analyzer
ContentsvContentsSafety and Preparation For Use . iiiContents . vSpecifications . xivCommand List. xviChapter 1 Getting Started1-1Unpacking .1-2Before You Open the Box.1-2Checklist.1-2Standard Equipment / Supplies .1-2Accessories.1-2Optional Equipment .1-2Related Equipment .1-3Installation.1-4Introduction .1-4Probe Installation .1-4Hardware Requirements.1-5Procedure .1-6Electronics Control Unit Installation .1-8Hardware Requirements.1-8Procedure .1-10RGA Windows Installation.1-11Minimum System Requirements (Single Head Operation) .1-11Procedure .1-12Turning on the RGA .1-12Running the SRS RGA System .1-13Chapter 2 RGA General Operation2-1What is an RGA? .2-2The SRS RGA.2-3Basic Operating Modes of the SRS RGA .2-5The SRS RGA as a Mass spectrometer.2-5The SRS RGA as a Single Gas monitor.2-6The SRS RGA as a Total Pressure Gauge .2-6Residual Gas Analysis Basics.2-8How Mass Spectra are Interpreted .2-8Partial Pressure Measurement .2-9Partial Pressure Sensitivity Factors .2-11SRS Residual Gas Analyzer
viContentsChapter 3 RGA Quadrupole Probe3-1Introduction . 3-2Ionizer . 3-3Description . 3-3Principle of operation . 3-3Parameter Settings . 3-4Quadrupole mass filter. 3-7Description . 3-7Principle of operation . 3-8Mass Range, Resolution and Throughput . 3-9Zero Blast Suppression. 3-12Ion Detector . 3-13Description . 3-13Faraday Cup operation. 3-14Electron Multiplier Operation . 3-14Hardware modifications . 3-18Repeller and anode grid modifications . 3-18Repeller removal . 3-19Operation without a filament . 3-19W filament replacement. 3-19RGA Cover Nipple Replacement . 3-20Chapter 4 RGA Electronics Control Unit4-1Introduction . 4-2Front Panel . 4-3Rear Panel. 4-4 24VDC@2.5A Connector . 4-4RS232/DCE/28.8k Connector . 4-5LED’s. 4-5Locking Knobs . 4-5Power entry module (Option 02) . 4-5LED Functionality . 4-6STATUS (Green) LED’s . 4-6ERROR (Red) LED’s . 4-7Electrometer . 4-8Detection limit vs. scan rate . 4-8Adjusting the Zero of the Ion Detector . 4-9SRS Residual Gas Analyzer
ContentsviiMass Filter Power Supply.4-10Maintenance and Service .4-11Chapter 5 RGA Windows Software5-1Overview .5-3Program Structure.5-3RGA Files .5-3RGA files (.rga).5-3RGA Scan log files (.ana .hst .tbl) .5-3RGA ASCII Data files (.asc).5-4RGA Graph Metafiles (.wmf) .5-4System Requirements.5-4Getting Started.5-5Starting the RGA Software .5-5Connecting to a Head .5-5Shutting Down the RGA System.5-5Features and Operation .5-7The RGA Window .5-7Multiple Head Operation .5-7Display Modes .5-7Analog (Mode Menu).5-7Histogram (Mode Menu) .5-8Table (Mode Menu) .5-8P vs T (Mode Menu) .5-9Leak Test (Mode Menu) .5-10Annunciator (Mode Menu) .5-10Library (Mode Menu) .5-11Data Acquisition .5-11Scan Data Logging.5-11Graph Management.5-12Head Management.5-12Sensitivity Factors.5-13Spectrum Analysis .5-13Background Data.5-13RGA Head and Scan Parameters .5-14Changing Scanning Parameters .5-14Changing Head Parameters .5-14Changing Scan Trigger Rates .5-15Display Modes .5-16Changing Display Modes.5-16SRS Residual Gas Analyzer
viiiContentsRunning in Split Display Mode . 5-16Manual Scaling of Graphs. 5-16Using Scan Data as Background. 5-17General Utilities. 5-18Using the Data Cursors . 5-18Cursor command. 5-18Cursor Properties command . 5-18Scheduled Saving of Data. 5-18Logging Scans . 5-18Viewing Scans . 5-18Browsing Through the Gas Library . 5-19Analyzing the Mass Spectrum . 5-20Spectrum Analysis description . 5-20Analysis Procedure. 5-20Averaging Scan Spectrum . 5-20Pressure Reduction . 5-21Y-Axis Unit Change. 5-21Head Calibration and Security.
Revision 1.8 (May, 2009) Operating Manual and Programming Reference Models RGA100, RGA2
