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Low VacuumPumpOil Rotary Vacuum Pump VD / VS / PVD / PKS seriesThe oil rotary vacuum pumps are the leading vacuum pumps with high pumping efficiency and consistentpumping performance. They can operate under the pressure between atmospheric pressure to 10Pa or lower.A wide variety of product lineup is available for various kinds of operation.VD40CPKS-070BVS650ASelection GuideModelStructureDriving typeCooling methodOil circulation systemOil-backflowprevention deviceNoteVD Ver.CVD（Small type）PVDVS650AVSPKSSingle stage rotaryvane typeSingle stage rotaryvane typeRotary plunger typeDirectBeltWater cooledAir cooled/Water cooledDouble stage rotaryvane typeDouble stage rotaryvane typeDouble stage rotaryvane typeDirectDirectBeltBeltAir cooledAir cooledAir cooled/Water cooledForcedForcedDifferential pressureDifferential pressureForcedDifferential pressureShutting off the oilcirculationShutting off the oilcirculationOptionalOil-backflowprevention deviceShutting off the oilcirculationShutting off the oilcirculationAir cooledI E3 motor is higher efficient than the conventional motor so the striking current tends to be higher. For the bigger pumps with 5.5kW motor or more,there is possibility that pumps don't start running due to insufficient power voltage in case that power capacity is low. Please confirm the powercapacity before using bigger pump.Rotary Plunger type Explanation imageD e t a il o f f e a t u r e sWhat is gas ballast ?Gas ballast is a countermeasure when handling condensablegas such as water vapor, etc. Condensable gas iscompressed through compression process inside oil vacuumpump, condensed and changed to liquid which mixeswith vacuum pump oil. It is left inside in the case of dryvacuum pump. In order to prevent this, it is possible to letcondensable gas exhaust without changing from air stateto liquid state by opening gas ballast valve and introducingcertain amount of air or nitrogen to the working chamberinside pump.A vane is assembled in the rotor inside the cylinder. Thevane compresses and exhausts the gas inside the cylinder.The oil lubricates and cools down the bearing part. It alsohas a sealing function to secure air tightness of the vaneand the cylinder.Excellent in compression efficiency and low vibration.These are the most frequently used vacuum pumps forindustrial use.The slide vane sliding on the vane guide part performspiston motion by rotation of eccentric rotor, therebyvolume of the space surrounded by slide vane andcylinder is varied and exhausted.Robust and comparatively strong for foreign materials.Workable for long term with appropriate regularmaintenance.What is helium tight type ?It is one of optional selections of oil rotation vacuum pump.This type is tested by the helium leak detector and has aleak tightness specification with 1x10-6 (Pa･m3/s) or below.Low Vacuum PumpRotary Vane type Explanation image
Oil Mist TrapTM / TMX seriesFeaturesThe trap to eliminate oil smoke exhausted from oil rotary vacuumpump.Exhaust sound is reduced especially at the time of repeat operationbetween ultimate pressure and atmospheric pressure.Cartridge type filter makes filter replacement easy.SpecificationsConnecting flange(pump side / outlet side)Weight[kg]TMX-1Special (with adapter ) / G1 x 1/2 (with screwed cover)1.18.5dia. 165.2 x 280 VD30C / VD301, VD40C / VD401TM401VF40 / G1 x 1/2 (with screwed cover)10dia. 165.2 x 2VF40 / G1 x 1/2 (with screwed cover)VF40 (with adapter) / G2 (with screwed cover)MaterialVF40 (with adapter) / VG50VF50 / G3 (with screwed cover)17VG80 / G3 (with screwed cover)VF50 / VG80VF50 / G4 (with screwed cover)Main unit :soft steel(SPCC)Filter :glass woolVF50 / VG100VF50 / VG100VD60C / VD601, VD90C / VD901High load typeVD60C / VD601, VD90C / VD901High load typeVD60C / VD601, VD90C / VD901dia. 362 x 735PKS-030Low load typeVS1501dia. 362 x 600VS1501PKS-030VS2401dia. 442 x 1160 PKS-070dia. 442 x 900VS2401dia. 442 x 1120 PKS-070dia. 450 x 1487 VS240164VG100 / VG100High load typePKS-016dia. 362 x 635Low load typeVD30C / VD301, VD40C / VD401dia. 285 x 455dia. 442 x 94536VG100 / VG100Remarks*2PKS-016dia. 362 x 70035VG100 / G4 (with screwed cover)VD151, VD201, PVD-180, PVD-360dia. 285 x 52518VG80 / VG80dia. 106 x 193dia. 285 x 4509.8VG50 / VG50For (pump model)dia. 285 x 5209.3VG50 / G2 (with screwed cover)Dimensions[mm]High load typedia. 450 x 1387 PKS-070High load typeF: Flange connection type instead of screwed cover.Select the high load when the pump repeatedly runs from atmosphere to vacuum in a short period or at the pressure higher than 10,000 Pa(100mbar / 75 Torr) for a long period .Oil Mist TrapOil mist trapOil Return MechanismOil mist trapFeaturesNeedle valveCheck valveOil return from the oil mist trap into the oil rotary vacuum pump.Four kinds of mechanisms are available for different working pressureand operating situations.Oil mistOil mistPumpPumpDetailsOil return mechanism AOil return mechanism BOil mist trapOil mist trapNeedle valveOil mistFloating-typeoil returnPumpPumpOil return mechanism COil mistOil return mechanism DRecovery Effect on ultimatemethodpressureOil returnOil returns into the pump case throughmechanism A the check valve when the pump stops.Semi-autoLowOil returnOil returns from the gas ballast portmechanism B through the needle valve.ManualSomeOil returnOil returns from the inlet port sidemechanism C through the needle valve.ManualHighAutoLowOil returnOil collected in the floating type oilmechanism D return returns from the inlet port side.* Oil return mechanism is not workable with the oil misttrap TMX-1.The TMX-1 has a check valve inside like the oil returnmechanism A.Recommended pressure range[Pa] 1Atmosphericpressure [Torr / mbar] 0.01100.1102110001010000100Continuously-workable pressure rangeRepeatable working pressure rangewww.ulvac.co.jp/enULVAC, Inc. Components DivisionOverseas Sales in Japan TEL 81-467-89-2261USA : ULVAC Technologies, Inc.GERMANY : ULVAC GmbHCHINA : ULVAC (SHANGHAI) Trading Co.,Ltd.TAIWAN : ULVAC TAIWAN, Inc.KOREA : ULVAC KOREA, Ltd.SINGAPORE : ULVAC SINGAPORE PTE LTDTEL 1-978-686-7550TEL 49-89-960909-0TEL (86)21-6127-6610TEL 886-3-579-5688TEL 82-31-683-2922TEL 65-6542-2700PHILIPPINES : ULVAC SINGAPORE PTE LTD Philippines BranchVIETNAM : ULVAC SINGAPORE PTE LTD Vietnam Representative OfficeINDONESIA : ULVAC SINGAPORE PTE LTD Indonesia Representative OfficeTHAILAND : ULVAC (THAILAND) LTDMALAYSIA : ULVAC MALAYSIA SDN. BHD.INDIA : ULVAC, Inc., India BranchTEL 63-46-437-7700TEL 84-8-6255-6762TEL 62-21-8990-5070TEL 66-2-7388883TEL 60-3-5121-4700TEL 91-40-27007006This catalog is subject to change without notice.This catalog is published in order to sell this product in overseas. Please see Japanese catalog when purchasing in Japan.1054E/2018052000SP
Double Stage Rotary Vane typeVD series Ver.CFeaturesWith high efficiency (IE3) full multi-voltage motor developed byULVAC. For various kinds of application.Single kind high efficient (IE3) full multi-voltage covers wide range voltagefrom 200 to 240V / 380 to 460V.Forced oil circulation makes pumping performance stable even nearatmospheric pressure. Suitable for repetitive and consecutive operationbetween atmospheric and vacuum.Various specification A, B and H are available in addition to standardmodel.SpecificationsModel50HzDesigned pumping speed60HzUltimate pressureMaximum watervapor toleranceMaximum watervapor capacityMotor*3Gas ballast portclose*1Gas ballast portopenGas ballastport open50HzGas ballastport open60HzGas ballastport TorrmbarPaTorrmbarPaTorrmbarg/hg/hTypeEnergy efficiency classkw (number of poles)HP (number of poles)50HzVoltage *460HzOilOil capacityLCooling methodInletOutletWeightkgExternal dimensions WxDxHApplicable standardStandard accessorymmRecommended oil mist trap .813.0140010.514.0190250VD60C0.675 10-36.7 10-321.5 10-22.0 3.57TM201: for low load operationTM401: for high load operationTM401: for low load operationTM-2: for high load operationOil mist trap, other oil types, gas ballast valve, ISO flange, explosion-resistant motor,special type for special application (spec A, B and H) Measured with a Pirani gauge. (Apprx. 6.7X10-2Pa when measured witha McLeod vacuum gauge.) VD90C is not allowed the continuous operation in the inlet pressure at1,000Pa or more.VD90C maximum water vapor tolerance / maximum water vaporcapacity (in the continuous operation) : 1000Pa / 600g/h Increased safety explosion-resistant motor and pressure proofexplosion-resistant motor are available as an option. Factory shipment setup is 200V class Δ delta connection.Please change it to Y connection if working voltage is 400V class. High load operation means repeat pumping down betweenatmospheric pressure and vacuum in short term or long time operationat 10,000 Pa (75 Torr) or higher.ApplicationsEvaporation and sputteringVacuum filling and gas exchangeVacuum adsorption , transport and castingVacuum moldingVacuum drying and freeze dryingAutomated leak testing , 3.29.7176028002820 *213.221.021.217.628.028.227043048041011001650 *2Totally enclosed fan cooled 3 phase induction motorIE31.5(4)2.2(4)3.7(4)2 (4)2.95(4)4.96(4)200V 240V/380V 415V200V 240V/380V 460VULVOIL R-71.0 〜 2.52.5 〜 4.0Air cooledVG40 equivalency / KF40 (optional)VG50 equivalency / KF50 (optional)VG40 equivalency / KF40 (optional)VG40 equivalency / KF40 (optional)586090133210 x 660 x 324210 x 680 x 324280 x 761 x 371280 x 831 x 371CE / cTUVusA dose of oil, a set of manualOptions*1VD40CP u m p i n g S p e e d C u r ve s
OptionSpecificationModelMain Seal MaterialIndependent oilfilling (oiler)He Leak TestStandardVD30C, VD40C, VD60C, VD90CFluorine Rubbern/an/aSpec. AVD30C-A, VD40C-ANitrile Rubbern/an/aSpec. BVD30C-B, VD40C-BSilicon Rubber-n/aSpec. HVD30C-H, VD40C-H, VD60C-H, VD90C-HFluorine Rubber--Model ExplanationE.g.) VD30C-02211-1903002230m3/h (50Hz) / Standard / FKM / R-7 / Totally enclosed external fan motor / Multiple voltage / ISO-KF /Without gas ballast valve / Without He leak test / English Instruction manual / English Warning VD90：90m3/h（50Hz）Rev.C：Current Rev.Naming *1None ： StandardA ： Spec. AB ： Spec. BH ： Spec. H2211 - ucture0 : Standard1 : Independent oilfilling (oiler)②Seal1 : NBR2 : FKM【std】5 : Silicon NBR③Oil1 : Mineral oil(R-4)2：Mineral oil(R-7)【std】6：Fluorine oil (J60)④Vane1 : Resin【std】⑤Exhaust valve plate1 : Stainless【std】⑥⑥Motor kind *21：Totally enclosed externalfan Flame-proof (indoor)⑦Motor voltage9：Multiple voltage【std】A：Other (specified voltage)⑧Motor frequency0：Not select【std】1：50Hz2：60Hz⑨Inlet/Outlet flange3：Inlet/Outlet ISO-KF4：Inlet/Outlet JIS【std】7：Inlet ISO-KF⑩Gas ballast valve0：None【std】1：Manual gas ballast valve⑪He leak test0 : Without【std】1 : With (H type only)⑫Instruction manual1 : Japanese2 : English⑬Warning label1 ： Japanese2 ： English3 ： Simplified Chinese4 ： Traditional Chinese5 ： KoreanThere is not any naming for standard type. A, B or H spec is selectable as option. Options for pump head and accessories are differentdepending on the type.Multiple voltage motor is not available in the case of explosion-protection and flame-proof motor. Voltage needs to be specified.DimensionsVD-COutlet portGas ballast port G3/8Oil mist trap（option）VG40Tap depth 14Inlet port（Q）H5H1RPNOW2MHH3L1（TM201）H4Cfan cooled motor(TM401）WATotally enclosed(TM-2）Oil supply port G1Tap depth 14W1＊２External option0H2＊１Pump head option-Oil drain 395395390570ＮＯ365150365150365230540 2132Ｗ２2102102802803
Small Size Double Stage Rotary Vane typeVD seriesFeaturesSingle kind high efficient (IE3) full multi-voltage covers wide range voltagefrom 200 to 240V / 380 to 460V.Forced oil circulation makes pumping performance stable even nearatmospheric pressure.Suitable for repetitive and consecutive operation between atmosphericand vacuum.SpecificationsModel50HzDesigned pumping 11.89m3/hr17.324.2L/min28840310.1814.24cfmPaGas ballast portcloseUltimate pressure*15 10-3mbar6.7 10-3PaGas ballast portopenMaximum water vapor tolerance6.7Torr5 10-2mbarGas ballast portopenMaximum water vapor capacity6.7 10-2Pa500Torr3.89.8mbar5.013.040138g/hTypeIE10.55 (4)HP (number of poles)0.75 (4)*3IE3*2kw (number of poles)Voltage1300Totally enclosed fan cooled 3 phase induction motorEnergy efficiency classMotor0.67Torr0.75 (4)1 (4)50Hz200V 240V/380V 415V60Hz200V 240V/380V 460VOilULVOIL R-7Oil capacityL0.7 〜 1.1Cooling methodAir cooledInletKF25 equivalencyOutletWeightG1kgExternal dimensions WxDxHmm2934.5170 x 513 x 240170 x 536 x 265Applicable standardCEStandard accessoryA dose of oil, a set of manualRecommended oil mist trap (Optional)TMX-1 adapter flangeOptionsOil mist trap*1 Measured with a Pirani gauge. (Apprx. 6.7X10 Pa when measured with a McLeod vacuum gauge.)*2 The energy efficiency regulation is not applicable for this motor.*3 Factory shipment setup is 200V class Δ delta connection. Please change it to Y connection if working voltage is 400V class.-2P u m p i n g S p e e d C u r ve sApplicationsVacuumVacuumVacuumVacuum4filling and gas exchangeadsorption , transport and castingmoldingdrying and freeze dryingVD201 50Hz
Small Size Double Stage Rotary Vane type PVD seriesFeaturesLegacy and small size double stage oil rotary vane pump.Quiet and low speed rotation.Enclosed belt cover for safety.SpecificationsModelPVD-180*150HzDesigned pumping speed60HzGas ballast portcloseUltimate pressure*2Gas ballast 72cfm6.513Pa0.67Torr5.0 10-3mbar6.7 10-2Pa6.7Torr5 10-2mbarTypeMotor6.7 10-2Totally enclosed fan cooled 3 phase induction motorEnergy efficiency classIE1*3IE3kw (number of poles)0.4 (4)0.75 (4)HP (number of poles)0.54 (4)Voltage1 (4)50Hz60Hz200V200V / 220VOil200V / 220V / 230VULVOIL R-7Oil capacityL0.30.5Cooling methodAir cooledInletOutletWeightPVD-360m3/hrKgExternal dimensions WxDxHmmdia.28 dia.19dia.34 dia.27G3/4G133.543265 x 470 x 321303 x 488 x 321Applicable standard-Standard accessoryA dose of oil, a set of manualRecommended oil mist trap (Optional)TMX-1 adapter flangeOil mist trap, other oil types, explosion-resistant motor,special type for special application (spec B and H)Options*1 PVD-B models (with oil back-flow prevention mechanism) are designated as PVD-180-B for the PVD-180 model and PVD-360-B for the PVD-360 models.*2 Measured with a Pirani gauge. (Apprx. 6.7X10-2Pa when measured with a McLeod vacuum gauge.)*3 The energy efficiency regulation is not applicable for this motor.P u m p i n g S p e e d C u r ve sApplicationsVacuumVacuumVacuumVacuumfilling and gas exchangeadsorption , transport and castingmoldingdrying and freeze drying5
Small Size Double Stage Rotary Vane type VD / PVD seriesDimensionsVDInlet port KF25ABCWOutlet（Ｊ）Oil supply port G3/4Oil mist trapTMX-1（Option）Totally enclosedGH3H1H2HH4fan cooled motorEFDLDrain valve Rc3/8ＴＹＰＥＡＶＤ１５１ 238ＶＤ２０１ Ｈ４396439Ｌ513535.5Ｗ170181PVDCDAWW2W1GBLOil mist trapLSolenoid valve（B-type）Outlet pipe screw(J)TMX-1（Option）OutletInlet port（Oil supply port）O･D（M）／ I･D（N）Screw（P）Oil drain port M12H4Totally enclosedH1H3HH2fan cooled －321－327Ｈ３Ｊ177 Ｇ３／４177 Ｇ３／４195.5 Ｇ１195.5 φ２８φ３４φ３４ＮＰＷφ１９ Ｇ３／４ 265φ１９ Ｇ３／４ 265φ２７Ｇ１ 303.5φ２７Ｇ１ 303.5Ｗ１65658080Ｗ２180180220220
Single Stage Oil Rotary Vane typeVS seriesFeaturesLower ultimate pressure even it is single stage oil rotary vane pump.Lower vibration structure compared with Rotary plunger model. Suitablewhen installing at upper floor.Forced oil circulation makes pumping performance stable even nearatmospheric pressure. Suitable for repetitive and consecutive operationbetween atmospheric and vacuum.SpecificationsModelVS150150HzDesigned pumping speed60HzGas ballast portcloseUltimate pressure*1Gas ballast m3/hr180288L/min30004800cfm105.9169.4Pa5.3Torr3.9 10-2mbar5.3 10-2Pa80Torr0.6mbarType0.8Totally enclosed fan cooled 3 phase induction motorEnergy efficiency classMotorIE3kw (number of poles)5.5 (4)HP (number of poles)7.5 (4)VoltageCapacity(kVA)7.5 (4)10 (4)50Hz200V 240V/380V 415V60Hz200V 240V/380V 460V50Hz4060Hz355550OilULVOIL R-7Oil capacityL8.0 10.5Cooling methodWater cooledInletVG80 equivalencyOutletWeightVG50 equivalencykgExternal dimensions WxDxHmm232271330 941 460333 1061 460Applicable standard-Standard accessoryA dose of oil, a set of manualRecommended oil mist trap (Optional)OptionsTM-3（F） adapter flangeOil mist trap, other oil types, gas ballast valve,ISO flange,explosion-resistant motor,special type for special application (spec H and R)*2Measured with a Pirani gauge. (Apprx. 5.3X10-1Pa when measured with a McLeod vacuum gauge.)P u m p i n g S p e e d C u r ve sApplicationsEvaporation and sputteringVacuum filling and gas exchangeVacuum adsorption , transport and castingVacuum moldingVacuum drying and freeze dryingAutomated leak testing , etc300Pumping Speed [m3/hour]*1TM-2（F） adapter flangeGas Ballast ClosedGas Ballast Open250VS2401 60Hz200VS2401 50Hz150VS1501 60HzVS1501 50Hz100500110100100010000100000Pressure [Pa]7
Single Stage Oil Rotary Vane type VS650A / VS750AFeaturesLarge size and low vibration single stage oil rotary vane pump.Selectable from air and water cooled type. Oil cooler is used for oiltemperature cooling for a air cooled model.Equipped with a cartridge-type oil mist filter inside the oil tank.Cleaning of the inside of the oil tank and replacement of the oil mist filterare easy.SpecificationsModelm3/h50Hz L/mincfmm3/h60Hz 2TorropenmbarPa50Hz TorrmbarPa60Hz TorrmbarPa50Hz TorrmbarPa60Hz Torrmbar50Hz kg/h60Hz kg/h50Hz kg/h60Hz kg/hMax. pumping speedUltimate pressure*1GP1 openMax. water vaportolerance *2GP2 openMax. water vaporcapacity *2Motor*3GP1 openGP2 openTypekw (poles)HP (poles)PowerconsumptionVoltage*5CapacityOilOil capacity LCooling method*450Hz60Hz50Hz60Hz50Hz60HzPrimary side pressureCooling waterInlet/outlet Weight kgExternal dimensions WxDxHApplicable standardStandard 50056.47517242634kWkWVVkVAkVAMPapsiMPapsiL/min Fmm6501083338375012500441VS650A-W86 10-28 y enclosed external fan 3 phase AC motor22（4）29.5 (2)811200V 240/380V 415200V 240/380V 46013020025 30Water cooled 0.5 72.5 0.1 14.5 3.05 3041 868061490 905 7058001490 841 705 Measured with a Pirani vacuum gauge.（Approx. 0.8Pa when measured with a McLeod vacuum gauge.)*2 Water vapor tolerance and capacity are measured under followingcooling water capacity. Cooling water temperature at inlet port is26 (78.8F).8900VS650A-WVS750A-W50Hz3 L/min.5 L/min.80060Hz5 L/min.-70050Hz3 L/min.5 L/min.60060Hz5 L/min.- Increased safety explosion-resistant motor and pressure proofexplosion-resistant flange motor are available as option. However,multiple voltage cannot be selected.*4 At ultimate pressure*5 Factory shipment setup is 200V class Δ delta connection. Pleasechange it to Y connection if working voltage is 400V class.*6 Size to connect pipe changes when JIS flange is selected for inlet/outlet 013n/a19n/a11n/a200V 240/380V 415n/a200n/a23 27Air cooled－－－－－－－25 30Water cooled 0.5 72.5 0.1 14.5 3.05 3041 867961490 841 705P u m p i n g S p e e d C u r ve sPumping Speed ［m3/h］*3DN 100 ISO-KDN 100 ISO-K75012500441n/an/an/a8021490 905 705－Oil for one pump, 1 set of instruction manualother oil types, flame-proof motor,specified voltage motor,JIS flange *6, gas ballast valve 2 (manual)*1GP1・2 openULVOIL R-723 27Air cooled－－－－－－－OptionsGP1 openVS750A-AGas Ballast ClosedGas Ballast Valve 1 OpenedGas Ballast Valve 1 2 OpenedVS650 60Hz( VS750 50Hz )VS650 50Hz50040030020010001101001000Pressure ［Pa］10000100000
Model ExplanationE.g.) VS650A-W-02222-192211131650m3/h (50Hz) [750m3/h (60Hz)] / totally enclosed external fan motor / multiple voltage / ISO-K flangeWater cooling / 1 gas ballast valve (manual) / Japanese & English Instruction manual / Japanese Warning labelModelRev.VS650ANamingW-Pump head option-External option02222 - �750m3/h（50Hz）Namingequal option ⑨A : Air coolingW : Water coolingRev.A : Current Rev.①Structure0 : Standard②Seal2 : FKM③Oil2 : Mineral oil(R-7)④Vane2 : Resin⑤Exhaust valve vane2 : Stainless⑥⑥Motor kind1 : Totally enclosed external fan motor4 : Flame-proof (indoor) *1 *2⑦Motor voltage9 : Multiple voltageA : Other (specified voltage)⑧Inlet/Outlet flange2 : ISO-K flange4 : JIS flange⑨Cooling method1 : Air cooling2 : Water cooling⑩Gas ballast valve1 : 1 gas ballast valve (Manual)3 : 2 gas ballast valves (Manual)⑪Oil filter1 : With oil filter⑫Back flow prevention valve1 : With spring⑬Instruction manual3 : Japanese ＆ English⑭Warning label1 : Japanese2 : English3 : Simplified Chinese4 : Traditional Chinese5 : Korean＊1 VS750A is only 50Hz. It is impossible to run at 60Hz.＊2 Explosion-resistant is available with only motor.Not attached thermostat and electrical box in the case of selecting explosion-resistant motor.＊3 Multiple voltage motor is not available with Explosion-resistant motor.Explanation image① ⑦ ⑧ ② ③ 1.2.3.4.5.6.7.8.9.⑫ ⑤ ⑭ ⑨ ⑮ ⑬ ④ ⑪ ⑩ ⑥ InletAnti Suckback ValveCylinderRotorVaneOil Feed LineGas BallastExhaust ValveOil Tank10.11.12.13.14.15.Oil FilterOil Level Gauge Oil Mist Filter ElementsOil Return ValveOil Return LineOutletDimensionsVS650AInlet portOil suppy plag G1W1CWDN 100 ISO-KOutlet portDN100 ISO-KH1HABH2Water outlet G1/2（Water cooling type）Water inlet G1/2（Water cooling �951Ｃ308Ｄ1170GFＨ２505Ｌ1541Oil drain plug �486.59
Rotary Plunger typePKS seriesFeaturesPKS series models are extremely durable rotary plunger vacuumpumps with very stable pumping .Robust and long-life and low-speed-rotatation pump with less rotarysliding parts. Materials in the pump is highly resistant to abrasion.The high-efficiency (IE3) multi-voltage motor, fully developed by ULVAC.The enclosed belt cover and the inspection hole to check the rotationdirection and belt tension in safe. (PKS-070B)SpecificationsModelPKS-016Designed pumping speed9618042016003000700057106247cfmUltimate pressure*2Gas ballast port openMaximum water vapor toleranceMaximum water vapor capacityGas ballast port openGas ballast port openPKS-070BL/minPaGas ballast port closePKS-030m /hr3*12.7Torr2 10-2mbar2.7 00Torr4.96.845.1mbar6.59.060.05712g/hTypeTotally enclosed fan cooled 3 phase induction motorEnergy efficiency classIE3kw (number of poles)2.2(4)3.7(4)11(6)HP (number of poles)MotorVoltageCapacity(kVA)50Hz200V 240V/380V 415V60Hz200V 240V/380V 460V50Hz1060HzOil651575ULVOIL R-7Oil capacityL6.5Cooling method820Air cooledWater cooledInletVG50VG80OutletVF50VF80VF100225380（W/O moter）900（W/O moter）587 884 572721 675 973971 983 1190WeightkgExternal dimensions WxDxHmmApplicable standardCE、cTUVusStandard accessoryVG100*3A dose of oil, a set of manualRecommended oil mist trap (Optional)TM-2TM-3TM-4、TM-4SOil mist trap, other oil types, ISO flange, explosion-resistant motor,special type for special application (spec H and L)Options*1 The PKS-070B model is improved with the change on cast iron shape, a larger oil level gauge, a larger capacity oiler, and an enclosed belt coverwith an inspection hole. It has the same mounting dimension and performance as the conventional model.*2 Measured with a Pirani gauge. (Apprx.2.7 10-1Pa when measured with a McLeod vacuum gauge. )*3 Expected to obtain in March 2018P u m p i n g S p e e d C u r ve sApplicationsVacuum heat treatment furnaces , sintering fumaces ,brazing fumacesVacuum moldingEvaporation and sputteringVacuum drying and freeze dryingVacuum distillationsolvent and powder10
VS1501 / VS2401 / PKS seriesDimensionsVSOil mist trap（Option）Totally enclosedfan cooled motorGas ballast port G3/8 Outlet port VG50Tap depth 17Oil supply port G1BL1H3Oil return port G1/4External filter port outletHH2H1G3/8（TM－3）AH4W（TM－4）W1Inlet port VG80Tap depth 22Water outlet G3/8PWater inlet G3/8MＢ340ＶＳ２４０１ �１５０１ 116External filter port inletNＨ１420Ｈ２391420393Ｈ３Ｈ４1035 1365Oil drain plugＬ941Ｌ１5711035 1365 �／４Ｗ１163163PKSBPKS-030/PKS-070BTap depth20DCTap depth16F（For anchor bolt）EW1Inlet port（Ｊ）ABOutlet port（Ｋ）（For anchor bolt）W1WOil drain port（Ｍ）Water outletRc3／8WOil supply port（Ｎ）93Water inletOil mist trap（Option）Inlet port（Ｊ）Tap depth18Rc3／8Outlet port（Ｋ）Tap depth25/070Tap depth18/030Totally enclosedfan cooled motorH2GH2FOil drain 46Ｅ602525ＦＧＨ700 ４－Φ１９ 572470 ４－Φ２２ 973537 ４－Φ２２ 1190LＨ１550624743E（For anchor lly enclosedfan cooled motorHH3（TM－2）H4Oil supply �－－1887DCG（For anchor bolt）Ｈ６ＪＫＬＭＮ－ＶＧ５０ ＶＦ５０ 884 Ｒｃ３／８ Ｇ３／４610 ＶＧ８０ ＶＦ８０ 675 Ｒｃ１／２ Ｇ３／４727 ＶＧ１００ ＶＦ１００ 983 Ｒｃ３／４ Ｇ１・１／４Ｗ587712971Ｗ１24713720011
Low Vacuum Pump PKS-070B VD40C VS650A 18/05/30 09:28:28 The oil rotary vacuum pumps are the leading vacuum pumps with high pumping efficiency and consistent pumping performance. They can operate under the pressure between atmospheric pressure to 10Pa or lower. A wide variety of product lineup is available for various kinds of operation.
