Pressure Gauges, Ultrahigh-Purity And Clean Dry Air, PGU .

Transcription

Pressure Gauges, Ultrahigh-Purity and Clean Dry Air—PGU and PGC Series1www.swagelok.comPre s sure G auge sUltra high-Pur it y a nd Cle a n D r y A irPGU a nd PGC Se r ie s 40 and 50 mm (1 1/2 and 2 in.) dial sizes Accuracy in accordance with ASME B40.100 Center-back and lower mount configurationsUHP / CDAPRESSUREGAUGES 316L VAR end connections (PGU series)

2Measurement DevicesContentsFeatures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3Technical Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3Testing and Calibration . . . . . . . . . . . . . . . . . . . . . . . 3Cleaning and Packaging . . . . . . . . . . . . . . . . . . . . . . 3Materials of Construction . . . . . . . . . . . . . . . . . . . . . . 3Process Connections . . . . . . . . . . . . . . . . . . . . . . . . . 3Dimensions and Dial RangesPGU Series: Ultrahigh-Purity Gauges . . . . . . . . . . 4PGC Series: Clean Dry Air Gauges . . . . . . . . . . . . 5Ordering Information . . . . . . . . . . . . . . . . . . . . . . . . . 6Dial Range Designators . . . . . . . . . . . . . . . . . . . . . . . 6UHP / CDAPRESSUREGAUGESOptions and Accessories . . . . . . . . . . . . . . . . . . . . . . 7

Pressure Gauges, Ultrahigh-Purity and Clean Dry Air—PGU and PGC SeriesFeaturesSwagelok offers Bourdon tube pressure gauges to monitorpositive system pressure and vacuum. Gauges are availablefor use in a wide range of applications, from bulk gasdistribution to process tool applications.Technical DataDial RangesSee page 4 for PGU series and page 5 for PGC seriesdial range information.Accuracy 50 mm (2 in.) dial size: 2 % / 1 % / 2 % of span(ASME B40.100, Grade A, EN 837-1 Class 2.5, JIS B7505Class 2.5) 40 mm (1 1/2 in.) dial size: 3 % / 2 % / 3 % of span(ASME B40.100, Grade B, EN 837-1 Class 4, JIS B7505Class 4)Operating Temperature Ambient: –40 to 140 F (–40 to 60 C) Media: –40 to 212 F (–40 to 100 C)Temperature Error 0.4 % for every 18 F (10 C) temperature change from 68 F(20 C)Testing and CalibrationEvery ultrahigh-purity and clean dry air gauge is 100 % factorycalibrated and helium leak tested to a maximum rate of1 10 –9 std cm3/s.Cleaning and PackagingPGU Series UHP “clean” for semiconductor gas applications,in accordance with SEMI/SEMATECH Cleaned and packaged in class 100/10 cleanroom Packaged in two bags3Materials of gh-PurityClean Dry Air(PGU Series)(PGC Series)316L VAR,316 SSelectropolishedBourdon tube316L SS316 SSCase304 SSMovementLensStainless steelSnap-in acrylic(40 mm [1 1/2 in.] dial)Twist-lock polycarbonate(50 mm [2 in.] dial)DialTwist-lockpolycarbonate(50 mm [2 in.] dial)AluminumPointerWetted components listed in italics.Process ConnectionsConnectionDesignatorUltrahigh-Purity (PGU Series)1/4 in. female VCR face seal fitting4FSF1/4 in. rotatable maleVCR face seal fitting4FSM1/4 in. integral maleVCR face seal fitting4FFMClean Dry Air (PGC Series)1/4 in. male NPT4NPTSee the Swagelok VCR Metal Gasket Face Seal Fittingscatalog (MS-01-24) for more information about VCR fitting endconnections.NPT end connections comply with ASME B1.20.1. Purged with nitrogen Protective cap over threaded connectionPGC Series Assembled, cleaned and packaged in class 100cleanroom Packaged in single nylon bag Purged with nitrogen Protective cap over threaded connection ASME B40.100, Level IVUHP / CDAPRESSUREGAUGES

4Measurement DevicesDimensions and Dial RangesDimensions, in inches (millimeters), are for reference only and are subject to change.See page 6 for Ordering Information and Dial Range Designators.PGU Series: Ultrahigh-Purity Gauges50 mm (2 in.) GaugesDial RangesLower MountCompound GaugesCenter-Back Mount1.140.43 Vacuum to 15 psi through vacuum to(29.0)(10.9)300 psi Vacuum to 0.1 MPa through vacuumto 2.1 MPa2.282.00(57.9)Positive Pressure Gauges(50.8) 0 to 15 psi through 0 to 3000 psi 0 to 0.1 MPa through 0 to 21 0.8)0.55(14.0)AEnd ConnectionTypeFemale VCRface seal fittingRotatable male VCRface seal fittingIntegral male VCRface seal fittingSizeAin. (mm)2.321/4 in.(58.9)1.88(47.8)40 mm (1 1/2 in.) Center-Back Mount GaugesDial Ranges1.08(27.4)Compound Gauges Vacuum to 15 psi through vacuum to300 psi1.54(39.1) Vacuum to 0.1 MPa through vacuum0.55(14.0)to 2.1 MPaPositive Pressure GaugesA 0 to 15 psi through 0 to 3000 psiUHP / CDAPRESSUREGAUGES 0 to 0.1 MPa through 0 to 21 MPaEnd ConnectionTypeFemale VCRface seal fittingRotatable male VCRface seal fittingIntegral male VCRface seal fittingSizeAin. (mm)2.571/4 in.(65.3)2.16(54.9)End ConnectionTypeFemale VCRface seal fittingRotatable male VCRface seal fittingIntegral male VCRface seal fittingSizeAin. (mm)2.591/4 in.(65.8)2.23(56.6)

Pressure Gauges, Ultrahigh-Purity and Clean Dry Air—PGU and PGC Series5Dimensions and Dial RangesDimensions, in inches (millimeters), are for reference only and are subject to change.See page 6 for Ordering Information and Dial Range Designators.PGC Series: Clean Dry Air Gauges50 mm (2 in.) GaugesLower MountDial Ranges1.140.43(29.0)(10.9)Compound Gauges Vacuum to 15 psi through vacuum to300 psi2.28 Vacuum to 0.1 MPa through vacuumto 2.1 MPaPositive Pressure Gauges 0 to 15 psi through 0 to 6000 psi2.00(57.9)(50.8)1.94(49.3)0.55(14.0) 0 to 0.1 MPa through 0 to 40 MPa0.73(18.5)Center-Back 50.8)2.17(55.1)UHP / CDAPRESSUREGAUGES

6Measurement DevicesOrdering InformationBuild a gauge ordering number by adding the designators as shown below. List option designators alphabetically.PGU - 50 - PC100 - C - 4FSF - BFSeriesOptions (See page 7.)PGU Pressure gauge, ultrahigh-purity(PGU series)PGC Pressure gauge, clean dry air(PGC series)B Certificate of calibrationE Material test certificateF Panel-mount clamp (50 mm [2 in.]dial size and center-back mountconnection only)G Front flange (50 mm [2 in.] dial sizeand center-back mount connectiononly)M Alarm contact switch (50 mm[2 in.] dial size and center-backmount connection only)Dial Size40 40 mm (1 1/2 in.) dial (PGU series only)50 50 mm (2 in.) dialDial RangeSee below.Process Connection LocationFitting Size and TypeC Center-back mountL Lower mount (50 mm [2 in.] dial size only)PGU Series4FSF 1/4 in. female VCR fitting4FSM 1/4 in. rotatable male VCR fitting4FFM 1/4 in. integral male VCR fittingPGC Series4NPT 1/4 in. male NPTDial Range DesignatorsThe selected dial range should beapproximately two times the systemworking pressure, and the systemworking pressure should be in themiddle half (25 to 75 %) of the dialrange. Contact your authorizedSwagelok sales and servicerepresentative if the system workingpressure will exceed 75 % of the dialrange.Dial Range, psi (bar)(primary scale: psi; secondary scale: bar)Dial Range, MPa(primary scale: MPa; no secondary atorPGU and PGC SeriesPGU and PGC Series15 (1)PC150.1MC0130 (2)PC300.2MC0260 (4)PC600.4MC04100 (6.8)PC1000.7MC07160 (11)PC1601.1MC11200 (13.6)PC2001.4MC14300 (20.4)PC3002.1MC2115 (1)P150.1M0130 (2)P300.2M0260 (4)P600.4M04100 (6.8)P1000.7M070 psi160 (11)P1601.1M11(0 bar)200 (13.6)P2001.4M14300 (20)P3002.1M21600 (40)P6004.0M401000 (68)P10007.0M703000 (200)P3000–30 in. Hg(–1 bar)UHP / CDAPRESSUREGAUGESMaximum pressure is limited by theend connection.–0.1 MPa0 MPa21PGC Series Only0 psi(0 bar)M210PGC Series Only4000 (272)P40005000 (340)P50006000 (400)P60000 MPa28M28035M35040M400

Pressure Gauges, Ultrahigh-Purity and Clean Dry Air—PGU and PGC Series7Options and AccessoriesFactory-installed options are specified in gauge orderingnumbers, as shown in Ordering Information.Certificates of CalibrationThis option provides the user with a calibration sheet and aserial-numbered gauge, which has been calibrated with agauge that is traceable to National Institute of Standards andTechnology.Material Test CertificatesThese documents certify that the material composition ofthe wetted components has been tested by representativesindependent from the factory.Alarm Contact SwitchesThe alarm contact switch option is available for the 50 mm(2 in.) dial size. The factory-assembled switch has oneadjustable set point, which can be used for high- or lowpressure indication.SpecificationsOperating Voltage10 to 30 V (dc)Residual Ripple10 %No-Load Current 10 mAMaximum Switching Current 100 mALeakage Current 10 µAPanel-Mount ClampsVoltage Drop at IMAX 0.7 VFactory-installed stainless steel panel-mount clamps areavailable for flush mounting of center-back mount gauges.Switching Frequency1000 Hz0.73(18.5)2.79(70.9)0.38 (9.7)maxpanelthickness2.10(53.4)Ambient Temperature–25 to 70 C (–13 to 158 F)Output FunctionNormally open (closed andred LED ON when pressureless than set point)Output TypeNPNSwitch PointApprox 55 % of insert depthProtection Class (DIN 40050)IP 67Cable Length1 m (3.2 ft)Wiring DiagramPanelmountclamp2.63(66.8)BN (brown)Panel hole cutout 2.17 (55.0)Dimensions, in inches (millimeters), are for reference only and are subjectto change. BU (blue)–BK (black)ARL loadFront FlangesPolished stainless steel front flanges are available for flushpanel mounting of center-back mount 4)3.00(76.2)Panel hole cutout 2.17 (55.0)Caution: Do not mix or interchange parts with those ofother manufacturers.UHP / CDAPRESSUREGAUGESDimensions, in inches (millimeters), are for reference only and are subjectto change.MS-02-163, RevG, October 2017

About this documentThank you for downloading this electronic catalog, which is part of General Productcatalog Swagelok published in print. This type of electronic catalog is updated as newinformation arises or revisions, which may be more current than the printed version.Swagelok Company is a major developer and provider of fluid system solutions,including products, integration solutions and services for industry research,instrumentation, pharmaceutical, oil and gas, power, petrochemical, alternative fuels,and semiconductor. Our manufacturing facilities, research, service and distributionfacilities support a global network of more than 200 authorized sales and servicecenters in 57 countries.Visit www.swagelok.com to locate your Swagelok representative and obtain anyinformation on features, technical information and product references, or to learn aboutthe variety of services available only through authorized sales centers and serviceSwagelok.Safe Product SelectionWhen selecting a product, the total system design must beconsidered to ensure safe, trouble-free performance. Function,material compatibility, adequate ratings, proper installation,operation, and maintenance are the responsibilities of the systemdesigner and user.Warranty InformationSwagelok products are backed by The Swagelok LimitedLifetime Warranty. For a copy, visit your Swagelok Web site orcontact your authorized Swagelok representative.Swagelok, Ferrule-Pak, Goop, Hinging-Colleting, IGC, Kenmac,Micro-Fit, Nupro, Snoop, Sno-Trik, SWAK, VCO, VCR, UltraTorr, Whitey—TM Swagelok CompanyAflas—TM Asahi Glass Co. Ltd.AL-6XN—TM Allegheny Ludlum CorporationAutoCAD—TM Autodesk, Inc.CSA—TM Canadian Standards AssociationDeviceNet—TM ODVAKalrez, Krytox—TM DuPontElgiloy—TM Elgiloy Specialty MetalsFM —TM FM GlobalGrafoil—TM GrafTech International Holdings, Inc.MAC—TM MAC Valves Inc.Microsoft, Windows—TM Microsoft Corp.NACE—TM NACE InternationalNitronic—TM AK Steel Corporationpicofast—TM HansTurck KGPillar—TM Nippon Pillar Packing Company, Ltd.Rapid Tap—TM Relton Corporation15-7 PH, 17-7 PH—TM AK Steel Corp.Sandvik—TM SandvikABSilconert—TM Silcotek CorporationSimriz—TM Freudenberg-NOKSolidWorks—TM SolidWorks Corporation 2017 Swagelok Company

ASME B40 .100, Level IV. 4 Measurement Devices UHP / CDA PRESSURE GAUGES Dimensions and Dial Ranges Dimensions, in inches (millimeters), are for reference only and are subject to change . See page 6 for Ordering Information and Dial Range Designators. PGU Series: Ultrahigh-Purity Gauges Dial Ranges Compound Gauges Vacuum to 15 psi through vacuum to 300 psi Vacuum to 0 .1 MPa