Transcription
MEMS Micro-actuators enabling new andunforeseen applicationsSTMicroelectronicsAME Microsystems Product Marketing2017
Agenda MEMS Sensors and Actuators at ST: introduction and history Technologies for MEMS Micro-actuators: four pillars Changing the MEMS Landscape: innovative applications In-depth: Micro-Mirrors and Laser Beam Scanning Engines2
MEMS Sensors & Actuators at STEnvironmentalMotionAudioSensePhysical FluidicMicro-actuatorsPiezo actuatorsMicroMirrorsElectric3
Building Micro-ActuatorsMEMS micro-actuators & MEMS sensors use the same principles andsame basic processesMEMS sensors have ultra-low poweranalog signal processing partsMEMS micro-actuators have highvoltage/current analog and powermanagement parts(since higher voltages required for someapplications)SensorsMicro-mechanicalpartAnalog signalprocessingMicro-mechanicalpartAnalog signal &power managementMicro-actuatorsLeveraging our BCD technologies4
20 Years of MEMS Sensors & ActuatorsST 2015ACTUATINGMicroMirrorsGAS & VOC2017Piezoactuators5
20 Years of MEMS Sensors & ActuatorsIconic UATING20176
Agenda MEMS Sensors and Actuators at ST: introduction and history Technologies for MEMS micro-actuators: four pillars Changing the MEMS Landscape: innovative applications In-depth: Micro-Mirrors and Laser Beam Scanning Engines7
Micro-Actuation TechnologiesEnabling Multiple ApplicationsCamera autofocusSpeakersPMUTCommercial Inkjet print headVaporizer/Atomizer Piezo-ElectricElectrostaticConsumer Inkjet print -mirrors3D scanningMobile projectionMicro-mirrors3D ScanningMobile projection8
ElectrostaticWorking principle Electrostatic force is used as actuation mechanism by means of a comb drive structure, i.e.interdigitated silicon fingers, which apply a torque moment on the MEMS.VElectrostatic torque on mirror structure Voltage controlEnergy stored in a CapacitorEDifferentiating to get Comb Drive Forcing Moment:129
ElectrostaticSample ImagescavitycavityTorsional springfor linearactuationStaggered combfinger for linearMicro-MirrorTorsional springfor resonantactuationIn-plane combfinger for resonantMicro-Mirror10
Electro-MagneticDrive CoilsActuation PrincipleMirrorFixed MagnetsFixed MagnetsElectromagnetic actuation on mirror structurexCurrent flows into Drive coils part ofthe moving structureDevice houses magnets whichinduce fixed magentic field on thestructureFixedMagneticFieldTorsion SpringCurrentForceActuation Based on Lorentz Force:F11
Electro-MagneticSample ImagesCoil Wire for magnetic actuation. ThickECD growth ( 20um)View of Coils and Torsional SpringTop View with Coilsand SpringsMicroVision, Inc. 720p Bi-axial mirror12
Thin-Film PiezoActuation PrincipleThe piezo element generates avoltage when deformedDirect piezoelectric effect:Strain ChargeSensorsIf a voltage is applied across the piezoelement, it will deformReverse piezoelectric effect:Voltage Stress/StrainActuators13
Thin-Film Piezo14Bulk Piezo vs Thin-Film PiezoBulk Piezo2mm Micron thick layersproduce 2D form factorHigh PowerConsumption Mechanical assemblyrequires high capital orlow volumemanufacturingLower drive voltages forsimilar mechanicaldisplacements Large Form Factor Thin Film PiezoIntegrated into fabprocessing for very highvolume manufacturing2 µm
Thin-Film PiezoPZT Actuation Structure ST-Agrate has developed an industrial “Thin Film PZT” process which is able to address awide range of applicationsPZTMembraneSubstrate20V, 1Hz 30µm displacement15
Thin-Film PiezoSample ImagesTop electrodeVery dense film structureNo defects/voidsFilm is flat with very small grains2 µm PZTPZT and the metallic electrodespatterned by dry-etchBottom electrodeTop ElectrodeSloped sidewalls for goodpassivation step coveragePZTPZTOxideBottomElectrode16
Agenda MEMS Sensors and Actuators at ST: introduction and history Technologies for MEMS Micro-actuators: four pillars Changing the MEMS Landscape: innovative applications In-depth: Micro-Mirrors and Laser Beam Scanning Engines17
Changing the MEMS LandscapeStrategic PartnershipsPiezo AutofocusST technologiesMicro-mirror ProjectionMEMS Loudspeaker18
MEMS LoudspeakersSTMicroelectronics and USoundAgree to Make World's FirstSpectacular-Sounding MEMSSpeakersFeb. 21st 2017“Compared to standard speakers, our piezo-MEMSdevices offer unprecedented mechanical precision,improving audio reproduction fidelity and devicereliability in very thin form factors. As the first-of-itskind device, our MEMS “Moon” speaker targetsearphone applications, bringing superior performanceto the audio world at a competitive price”http://www.st.com/content/st ml19
AutofocusTLens uses a piezoelectric to change theTLens No gravityimpactConstant fieldof viewLow Test &calibration costInstantfocusHigh opticalAxis stabilityExtremelylow powerconsumptionYXXSmall realestateNo magneticinterferenceSource: www.poLight.comshape of a transparent polymer film,imitating the functioning of the human eye20
Agenda MEMS Sensors and Actuators at ST: introduction and history Technologies for MEMS Micro-actuators: four pillars Changing the MEMS Landscape: innovative applications In-depth: Micro-Mirrors and Laser Beam Scanning Engines21
What is a MEMS μMirror Scanner? Tiny reflective mechanical device that swings at a given frequency Applications spanning from Visible to Invisible (IR typically)22
Technology ComparisonELECTROSTATICPROS: Simpler Technology (resonant)MEMS Power ConsumptionCONS: High Voltage RequiredQuasi-Static OperationRequires More ComplexTechnologiesPERFORMANCE: Total Force: Low Force Density: LowELECTROMAGNETICPROS: Low VoltageVery Good for Linear OperationCONS: MEMS Power ConsumptionExternal MagnetsPERFORMANCE: Total Force: High Force Density:Medium/LowPIEZOELECTRICPROS: Mid VoltageHigh Fidelity FeedbackMEMS Power ConsumptionCONS: PZT Small DisplacementsJust Resonant OperationPERFORMANCE: Total Force: Medium/High Force Density: High23
Laser Beam Scanning (LBS)Technology Principles and Applications Principles: Light from one/multiple lasers is combined into asingle beam Beam is relayed onto MEMS scanning mirror(s)Red LD Mirror(s) scan the beam in a raster pattern A projected image is created by modulating thelasers synchronously with the position of thescanned beam Applications:Green LDBlue LD Pico-projection and heads-up display (HUD) Virtual and Augmented Reality (VR, AR) 3D Sensing and Advanced Driver AssistanceSystems (ADAS)MEMS scanning mirrorCourtesy of Microvision24
Laser Beam Scanning (LBS)Display Systems: Block DiagramComplete System: Scanning Engine Electronics Subsystem Mirror(s) Drivers Video Projection ASIC Power Management Optical EnginePROJECTIONASICVIDEO INPUT IF Laser DriversLASERDIODEDRIVERPOWER MGMTOPTICSMEMSMIRROR(S)PDMIRRORCONTROLASIC Optics MEMS Mirror(s)LASERSRGB IR (opt.)Laserscontrol Lasers PhotodetectorsOPTICALENGINEELECTRONICSSUBSYSTEM25
Laser Beam Scanning (LBS)26Key Benefits for Pico-Projection ApplicationsFocus Free OperationEnhances the user experience,eliminates mechanical focus wheelsUltra Compact Engine SizeVery small and thin all-in-one package; does notrequire additional focus lenses; smaller than anyDLP solution achieving same resolutionLow Power ConsumptionExtremely power efficient even atmaximum brightness1.2 Short Throw Ratio for variablescreen sizes from a short distance – from12” to 120” and beyondWide Color Gamut RangeLaser diode light sources provide thewidest color gamut for vivid imagesIndustry leading Intense Contrast Ratioof over 80,000:1 and pure black for strikingimages; pixel level modulation (no backlight)eliminates background glow effect
ST & MicroVision Co-Marketing Agreement27On Nov 10, 2016, ST and MicroVision entered a co-marketing 161110005439/en/ ST is a worldwide leader in MEMS Microvision is a leader in LBS Technology More than 12 billion MEMS shipped More than 20 years of experience Mass production of Electrostatic andElectromagnetic MEMS µ-mirrors More than 500 patents in LBS componentsand applications Biz Model is to supply µ-mirrors and ASICs Biz model is to supply Engines/ComponentsCreate a strong market position and better serve our customers: Cooperate in marketing MEMS scanner based solutions Continue to work closely on new markets and products Cooperate in joint Technology development and roadmap
MicroVision LBS EnginesSmall Form Factor DisplayEngine: PSE-0403spaceH1 2017 Products: Pico Projection forSmall devicesDisplay Engine With 3DSensing for InteractivityfgfdgH2 2017 Products: Interactive displayapplications: mobile and IoT28
Small Form Factor Display EnginePSE-0403-101/102 - Key Features MicroVision’s PSE-0403 display engines offer an industry leadingcombination of made-for-mobile features in a small form factor High definition, focus free images even in motion Vivid, saturated colors Laser brightness and power efficiency Thinner than a pencil Intense contrast ratio Industry leading throw ratio Short focal length option29
Short Throw Interactive Display EnginePSE-0403sti-101 – Key FeaturesMicroVision is combiningProjected Display 3D Sensinginto a single, integrated scanning engine Short Throw projection Multi-touch interactivity High definition always-infocus images Vivid saturated colorsforInteractivity with projectedcontentEnables new and exciting products by mimickinga Windows 10 or Android touch screen display orproviding access to intermediate point cloud data Intense contrast ratio with trueblack Multi-mode operation: Display:table top and wall mode Interact:touch and point cloud modes30
Small and Ultra Small EnginesSide by Side ComparisonIPMEPMUltra Small Form Factor Reference DesignSmall For Factor Display EngineBased on ST Mono-axial Electrostatic MirrorsBased on MVIS Bi-axial Electromagnetic MirrorEyewearVolume 3.45 cm3 Thickness 0.5cmVolume 11.63 cm3 Thickness 0.6cm fits very slim and very small Mobile Devices fits slim, small Mobile DevicesUltra Low Power consumptionLow Power consumption25 Lumens35 LumensGood Image Quality: 600pSuperb Image Quality: 720p HD31
Changing the MEMS LandscapeBuilding a completely new Micro-actuators portfolio:Auto-FocusSpeakersPMUTPiezoVisible projectionMicro mirrorsOpticalAtomizer / Vaporizer3D printingFluidicEnvironmentalMEMS microphoneMotionSENSORS3D scanningMICRO-ACTUATORS 15M Mirrors shipped Thin Film Piezo technology in Mass Production Product diversification through strategic partnerships32
Thank you
Electro-Magnetic Electrostatic 9 Working principle . Cooperate in marketing MEMS scanner based solutions Continue to work closely on new markets and products Cooperate in joint Technology development and roadmap On Nov 10, 2016, ST and Micro
